Title: Design Rules for Self-assembled Block-copolymer Patterns Using Tiled-templates

نویسندگان

  • Jae-Byum Chang
  • Hong Kyoon Choi
  • Adam F. Hannon
  • Alfredo Alexander-Katz
  • Caroline A. Ross
  • Karl K. Berggren
چکیده

Directed self-assembly of block copolymers has been used for fabricating various nanoscale patterns, ranging from periodic lines to simple bends. However, assemblies of dense bends, junctions, and line segments in a single pattern have not been achieved by using sparse templates, because no systematic template-design methods for achieving such complex patterns existed. To direct a complex pattern by using a sparse template, the template needs to encode the key information contained in the final pattern, without being a simple copy of the pattern. Here we develop a set of topographic template tiles consisting of square lattices of posts with a restricted range of geometric features. The block-copolymer patterns resulting from all tile arrangements

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Design rules for self-assembled block copolymer patterns using tiled templates.

Directed self-assembly of block copolymers has been used for fabricating various nanoscale patterns, ranging from periodic lines to simple bends. However, assemblies of dense bends, junctions and line segments in a single pattern have not been achieved by using sparse templates, because no systematic template design methods for achieving such complex patterns existed. To direct a complex patter...

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تاریخ انتشار 2014